Ultrathin Silicon-on-Insulator Grating Couplers

被引：30

作者：

He, Li ^{[1
,2
]}

He, Yanling

Pomerene, Andrew ^{[3
]}

Hill, Craig ^{[3
]}

Ocheltree, Stewart ^{[3
]}

Baehr-Jones, Tom ^{[1
]}

Hochberg, Michael ^{[1
,4
]}

机构：

[1] Univ Delaware, Dept Elect & Comp Engn, Newark, DE 19716 USA

[2] Univ Washington, Dept Elect Engn, Seattle, WA 98105 USA

[3] BAE Syst, Semicond Technol Ctr, Manassas, VA 20110 USA

[4] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 119077, Singapore

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2012年 / 24卷 / 24期

关键词：

Grating coupler; silicon photonics; ultrathin silicon waveguide;

D O I：

10.1109/LPT.2012.2225830

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a novel grating coupler fabricated on a silicon-on-insulator (SOI) wafer operating at 1550 nm, based on an ultrathin 50-nm silicon geometry. The devices are fabricated in a CMOS-compatible process with a single etch step. A low insertion loss of -3.7 dB is achieved. We also calculate the backreflection loss to be -14 dB. The devices are likely to be useful in terms of light coupling between optical fibers and ultrathin silicon waveguides.

引用

下载

页码：2247 / 2249

页数：3

共 50 条

[41] Modelling of two-dimensional grating couplers on silicon-on-insulator waveguides using beam propagation method
Landru, N
Pascal, D
Koster, A
OPTICS COMMUNICATIONS, 2001, 196 (1-6) : 139 - 147
[42] Experimental demonstration of polarization-insensitive air-cladding grating couplers for silicon-on-insulator waveguides
Cheng, Zhenzhou
Tsang, Hon Ki
OPTICS LETTERS, 2014, 39 (07) : 2206 - 2209
[43] Silicon-on-insulator chip-to-chip coupling via out-of-plane or vertical grating couplers
Cabezon, Miguel
Garces, Ignacio
Villafranca, Asier
Pozo, Jose
Kumar, Pragati
Kazmierczak, Andrzej
APPLIED OPTICS, 2012, 51 (34) : 8090 - 8094
[44] BURIED-OXIDE SILICON-ON-INSULATOR STRUCTURES .2. WAVE-GUIDE GRATING COUPLERS
EMMONS, RM
HALL, DG
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1992, 28 (01) : 164 - 175
[45] Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform
Zhang, Zecen
Ng, Geok Ing
Qiu, Haodong
Wang, Wanjun
Guo, Xin
Rouifed, Mohamed S.
Liu, Chongyang
Wang, Hong
APPLIED OPTICS, 2017, 56 (19) : 5444 - 5449
[46] Arbitrary Coupling Ratio Multimode Interference Couplers in Silicon-on-Insulator
David Domenech, Jose
Fandino, Javier S.
Gargallo, Bernardo
Munoz, Pascual
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2014, 32 (14) : 2536 - 2543
[47] A Silicon-on-Insulator Microring Resonator Filter with Bent Contradirectional Couplers
Eid, Nourhan
Boeck, Robert
Jayatilleka, Hasitha
Chrostowski, Lukas
Shi, Wei
Jaeger, Nicolas A. F.
2016 IEEE PHOTONICS CONFERENCE (IPC), 2016, : 115 - 116
[48] Wide FSR Silicon-on-Insulator Microring Resonator with Bent Couplers
Eid, Nourhan
Jayatilleka, Hasitha
Caverley, Michael
Shekhar, Sudip
Chrostowski, Lukas
Jaeger, Nicolas A. F.
2015 IEEE 12TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP), 2015, : 96 - 97
[49] Mechanisms of thermally induced dewetting of ultrathin silicon-on-insulator
Sutter, P
Ernst, W
Choi, YS
Sutter, E
APPLIED PHYSICS LETTERS, 2006, 88 (14)
[50] Spectroscopic ellipsometry characterization of ultrathin silicon-on-insulator films
Price, J.
Diebold, A. C.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (04): : 2156 - 2159

← 1 2 3 4 5 →