Optical properties of post-annealed ZnO:Al thin films studied by spectroscopic ellipsometry

被引：13
|
作者：
Hwang, Y. H. [1 ]
Kim, H. M. [1 ]
Um, Y. H. [1 ]
Park, H. Y. [2 ]
机构：
[1] Univ Ulsan, Dept Phys, Ulsan 680749, South Korea
[2] Ulsan Coll, Ulsan 680749, South Korea
来源：
MATERIALS RESEARCH BULLETIN | 2012年 / 47卷 / 10期
关键词：
Optical properties; ZINC-OXIDE FILMS;
D O I：
10.1016/j.materresbull.2012.04.111
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, effects of the thermal annealing on the structural, electrical, and optical properties of Al-doped ZnO (ZnO:Al) thin films prepared by reactive radio-frequency sputtering were investigated. From the X-ray diffraction observations, the orientation of ZnO:Al films was found to be a c-axis in the hexagonal structure. The optical properties of the films were investigated by optical transmittance and spectroscopic ellipsometry characterization. Based on Tauc-Lorentz model, the optical constants of ZnO:Al films were extracted in the photon energy ranging from 1.0 to 4.5 eV. Our result showed that the refractive index and extinction coefficient of the films changed consistently with annealing temperature. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码：2898 / 2901
页数：4
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