Use of scanning electron microscopy in the detection of flaws in piezoelectric and ferroelectric crystals

The utility of scanning electron microscopy operated in a self-gating mode of secondary electrons is demonstrated for identification of surface defects in piezoelectric and ferroelectric crystals. A traveling surface acoustic wave (SAW) propagating over the crystal surface interacts with crystal defects, e.g. twin and domain structures, which results in distortion of the acoustic wave fields and makes it possible to visualize the defects under an electron microscope.