Size-Dependent Effects on the Temperature Coefficient of Resistance of Carbon Nanotube Vias

被引：21

作者：

Vollebregt, Sten ^{[1
]}

Banerjee, Sourish ^{[1
]}

Beenakker, Kees ^{[1
]}

Ishihara, Ryoichi ^{[1
]}

机构：

[1] Delft Univ Technol, Delft Inst Microsyst & Nanoelect, Dept Microelect, Lab Elect Components Technol & Mat, NL-2628 CT Delft, Netherlands

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2013年 / 60卷 / 12期

关键词：

Carbon nanotubes (CNT); electrical resistance; interconnections; temperature dependence; WALL;

D O I：

10.1109/TED.2013.2287640

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Carbon nanotube (CNT) vias were fabricated at 500 degrees C with different widths and lengths. The electrical resistance of the CNT vias was measured using four-point probe structures at temperatures between 25 degrees C and 190 degrees C. It was found that the temperature coefficient of resistance (TCR) of the CNT vias changes with both length and width. Most of the vias displayed a negative TCR between -300 and -400 ppm/K, against 3900 ppm/K for Cu, but for wider and shorter vias, this value becomes positive. A simple model is introduced, which can explain the length-dependent behavior.

引用

页码：4085 / 4089

页数：5

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