Simulation of isotope effects in single crystal sputtering

被引：0
|
作者：
Shulga, VI [2 ]
机构：
[1] Odense Univ, Dept Phys, DK-5230 Odense M, Denmark
[2] Moscow MV Lomonosov State Univ, Inst Nucl Phys, Moscow 119899, Russia
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1999年 / 147卷 / 04期
关键词：
sputtering; single crystal; molybdenum; argon; computer simulation; isotope effects; channeling; transparency;
D O I：
10.1080/10420159908226991
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
Sputlering of isoopic (001), (011), and (111) Mo single crystals with 0.15-10 keV Arions at low fluences has been studied by means of computer simulation. Attention was given to the dependence of the preferential emission of light isotopes on ion energy and direction of incidence. It has been shown that the enrichment in light isotopes results mainly from a high contribution to sputtering of recoils of low generations which, in turn, correlates very closely with the crystal transparency and accompanying channeling effects. At glancing incidence, the preferential emission of light isotopes is strongly affected by the surface channeling of bombarding particles.
引用
收藏
页码：225 / 239
页数：15
相关论文
共 50 条
  • [41] CASCADE SIMULATION OF THE CRYSTAL ORIENTATION DEPENDENCE OF SPUTTERING AND LATTICE DAMAGE OF SINGLE-CRYSTAL COPPER BY IRRADIATION WITH 100 KEV COPPER IONS
    MUELLER, GP
    ROSEN, M
    FRASER, WA
    SPRAGUE, JA
    MALMBERG, PR
    LAMBERT, JM
    TREADO, PA
    REYNOLDS, GW
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 18 (4-6): : 360 - 364
  • [42] CASCADE SIMULATION OF THE CRYSTAL ORIENTATION DEPENDENCE OF SPUTTERING AND LATTICE DAMAGE OF SINGLE CRYSTAL COPPER BY IRRADIATION WITH 100 kev COPPER IONS.
    Mueller, G.P.
    Rosen, Mervine
    Fraser, W.A.
    Sprague, J.A.
    Malmberg, P.R.
    Lambert, J.M.
    Treado, P.A.
    Reynolds, G.W.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1986, B18 (4-6) : 360 - 364
  • [43] Isotope sputtering of molybdenum
    Eckstein, W
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1997, 142 (1-4): : 319 - 322
  • [44] Isotope sputtering of molybdenum
    Eckstein, W
    Dohmen, R
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 129 (03): : 327 - 340
  • [45] NOTE ON ISOTOPE SPUTTERING
    SIGMUND, P
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 82 (01): : 192 - 193
  • [46] Isotope sputtering of molybdenum
    Eckstein, W.
    Dohmen, R.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1997, 129 (03): : 327 - 340
  • [47] Simulation of uniformity and lifetime effects in collimated sputtering
    Tait, RN
    Dew, SK
    Tsai, W
    Hodul, D
    Smy, T
    Brett, MJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (02): : 679 - 686
  • [48] SIMULATION OF ISOTOPIC MASS EFFECTS IN SPUTTERING.
    Shapiro, M.H.
    Haff, P.K.
    Tombrello, T.A.
    Harrison Jr., Don E.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1985, B12 (01) : 137 - 147
  • [49] Effects of annealing on the surface structure of Ga-isotope-implanted single-crystal ZnO
    Sakaguchi, I
    Hishita, S
    Ryoken, H
    Sato, Y
    Haneda, H
    SURFACE AND INTERFACE ANALYSIS, 2005, 37 (03) : 332 - 335
  • [50] Effects of hydrogen and bias on single-crystal Al growth on vicinal Si by DC magnetron sputtering
    Yokoyama, Shin, 1600, Publ by JJAP, Minato-ku, Japan (33):
12345