Determination of elastic modulus of thin films and small specimens using beam bending methods

被引：34
|
作者：
Mencík, J [1 ]
Quandt, E [1 ]
机构：
[1] Forschungszentrum Karlsruhe, Mat Res Inst, D-76021 Karlsruhe, Germany
来源：
JOURNAL OF MATERIALS RESEARCH | 1999年 / 14卷 / 05期
关键词：
D O I：
10.1557/JMR.1999.0291
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Elastic modulus of small specimens and thin films can be determined in bending tests using cantilever or three-point arrangement. The paper presents the basic formulae for these measurements, analyzes the errors which can arise, and shows how they can be reduced. The use of the method is illustrated on glass, silicon, and glass coated with TbDyFe.
引用
收藏
页码：2152 / 2161
页数：10
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