Phase change memory materials and their applications

被引:14
|
作者
Kozyukhin, Sergey A. [1 ]
Lazarenko, Petr, I [2 ]
Popov, Anatoliy, I [3 ]
Eremenko, Igor L. [1 ]
机构
[1] Russian Acad Sci, NS Kurnakov Inst Gen & Inorgan Chem, Leninsky Prosp 31, Moscow 11991, Russia
[2] Natl Res Univ Elect Technol, Pl Shokina 1, Moscow 124498, Russia
[3] Natl Res Univ, Moscow Power Engn Inst, Krasnokazarmennaya Ul 14, Moscow 111250, Russia
基金
俄罗斯基础研究基金会;
关键词
GE-SB-TE; DOPED GE2SB2TE5 FILMS; PERIODIC SURFACE-STRUCTURES; LASER-INDUCED MODIFICATION; THIN-FILMS; AMORPHOUS GE2SB2TE5; CRYSTALLIZATION BEHAVIOR; OPTICAL-PROPERTIES; CHALCOGENIDE GLASSES; MECHANICAL STRESSES;
D O I
10.1070/RCR5033
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Over the past 30 years, phase change memory materials based on chalcogenide semiconductors have rapidly developed from laboratory prototypes to materials extensively used as functional layers in various devices. First of all, this concerns compounds of the Ge-Sb-Te system, which can be reasonably considered as full-fledged functional materials. The review presents a current view of the control of properties of phase change memory materials by their chemical and structural modification. Both the existing and prospective applications of these materials are highlighted. The discussion of chemical modification focuses on popular dopants such as bismuth, tin, oxygen and nitrogen and also refractory metals. In the discussion of structural modification, the use of laser radiation is considered in detail. Currently, this is a key trend in increasing the operation speed of devices based on phase change memory materials. Data on the formation of periodic surface structures in these materials are highlighted and it is emphasized that this effect could find application in nanophotonics and optoelectronics in the near future. The bibliography includes 336 references.
引用
收藏
页数:37
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