Design and realization of a buried-heterostructure tunable-twin-guide laser diode with electrical blocking regions

被引:11
|
作者
Schmidt, B [1 ]
Illek, S
Gessner, R
Amann, MC
机构
[1] Uniphase Laser Enterprise AG, CH-8045 Zurich, Switzerland
[2] Siemens AG, Corp Technol, D-81730 Munich, Germany
[3] Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany
关键词
epitaxial layers; integrated optoelectronics; laser tuning; leakage currents; semiconductor growth; semiconductor lasers;
D O I
10.1109/3.760328
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An InGaAsP-InP buried-heterostructure tunable-twin-guide (TTG) laser diode is presented, incorporating epitaxially regrown p-n-p-n current blocking regions to minimize current leakage around the active region in the ridge, The laser design is based on a theoretical model describing the mechanism of current leakage and the influence of electrical blocking regions by a two-dimensional computer simulation. The technological realization of the laser device reveals a way to achieve a self-aligned transverse blocking region and a lateral ridge contact in any desired depth by a two-stage epitaxial process, Completely processed TTG laser diodes with buried blocking regions exhibit very good high-temperature performance and a wavelength tuning range of around 4.5 nm under forward bias together with a maximum light output of as much as 25 mW at room temperature.
引用
收藏
页码:794 / 802
页数:9
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