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Non-destructive and Non-contact Thickness Measurement for Optically Opaque Samples by Optical Fiber Heterodyne Interferometry System

被引：0
|
作者：
Eom, Jonghyun [1 ]
Park, Seong Jun [2 ]
Kim, Young Ho [2 ]
Lee, Byeong Ha [1 ,2 ]
机构：
[1] Gwangju Inst Sci & Technol, Dept Med Syst Engn, 123 Cheomdan Gwagiro, Kwangju, South Korea
[2] Gwanju Inst Sci&Technol, Sch Informat &Commun, Kwangju, South Korea
来源：
2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR) | 2013年
基金：
新加坡国家研究基金会;
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate a scheme of non-destructive and non-contact thickness measurement. By monitoring the laser-induced acoustic pressure wave with a compact optical fiber heterodyne interferometer, we could measure the thickness of an opaque or metallic sample.
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页数：2
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