High-Frequency Piezoelectric-on-Si MEMS Resonator and Numerical Method for Parameter Extraction

被引：0

作者：

Erbes, Andreja ^{[1
]}

Prasad, Abhinav ^{[1
]}

Seshia, Ashwin A. ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1TN, England

来源：

2014 EUROPEAN FREQUENCY AND TIME FORUM (EFTF) | 2014年

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design and characterization of a piezoelectrically-transduced (AlN) on silicon micro-mechanical resonator operating in its lateral bulk acoustic width-extensional mode at 28.73 MHz. The equivalent m-BVD model of the resonator is extracted using a least-squares-error algorithm which is presented in this paper. We report a mechanical Q factor of 5970 and motional resistance R-x of 273 Omega in vacuum (p(0) = 30 mTorr) for the fundamental bulk acoustic mode for a 240 mu m x 149 mu m resonator. A good fit between the m-BVD model and the experimental data is obtained using the numerical fitting algorithm.

引用

页码：305 / 307

页数：3

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