Aspheric formtesting using multiple-wavelength approaches in combination with Sub-Nyquist-techniques

被引:2
|
作者
Pfeifer, T [1 ]
Mischo, H [1 ]
Evertz, J [1 ]
Tutsch, R [1 ]
机构
[1] FRAUNHOFER INST PROD TECHNOL,D-52074 AACHEN,GERMANY
关键词
aspherics; sub-aperture-interferometry; sub-Nyquist-interferometry; multiple-wavelength-interferometry;
D O I
10.1117/12.246769
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:401 / 408
页数:8
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