Fabrication of InP-based two-dimensional photonic crystal membrane

被引：19

作者：

Xing, A ^{[1
]}

Davanco, M ^{[1
]}

Blumenthal, DJ ^{[1
]}

Hu, EL ^{[1
]}

机构：

[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2004年 / 22卷 / 01期

关键词：

D O I：

10.1116/1.1635848

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication process of a InP-based two-dimensional photonic crystal membrane structure is developed. The process includes a well-calibrated electron-beam (e-beam) lithography and InGaAsP/InP etching using methane-hydrogen-argon reactive ion etching. The photonic crystal blocks with ten rows of a hexagonal array of holes with various lattice constants and filling factors are successfully fabricated and characterized by optical transmission measurement. The sensitivity of the band gap to the systematic fabrication error is determined. (C) 2004 American Vacuum Society.

引用

页码：70 / 73

页数：4

共 50 条

[21] Two-dimensional photonic crystal fabrication using fullerene films
Gaevski, ME
Kognovitskii, SO
Konnikov, SG
Nashchekin, AV
Nesterov, SI
Seisyan, RP
Zadiranov, JM
NANOTECHNOLOGY, 2000, 11 (04) : 270 - 273
[22] POSSIBILITY OF INP-BASED 2-DIMENSIONAL PHOTONIC CRYSTAL - AN APPROACH BY THE ANODIZATION METHOD
BABA, T
KOMA, M
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (2B): : 1405 - 1408
[23] Room-temperature simultaneous in-plane and vertical laser operation in a deep-etched InP-based two-dimensional photonic crystal
Cojocaru, C
Raineri, F
Raj, R
Monnier, P
Drisse, O
Legouézigou, L
Chandouineau, JP
Pommereau, F
Duan, GH
Levenson, A
IEE PROCEEDINGS-OPTOELECTRONICS, 2005, 152 (02): : 86 - 89
[24] Two-dimensional waveguide based photonic microstructures in GaAs and InP
Krauss, TF
Smith, CJM
Vogele, B
Murad, SK
Wilkinson, CDW
Grant, RS
Burt, MG
DeLaRue, RM
MICROELECTRONIC ENGINEERING, 1997, 35 (1-4) : 29 - 32
[25] Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal
Ma Xiao-Tao
Zheng Wan-Hua
Ren Gang
Fan Zhong-Chao
Chen Chang-Hui
ACTA PHYSICA SINICA, 2007, 56 (02) : 977 - 981
[26] Fabrication and luminescence characterization of two-dimensional GaAs-based photonic crystal nanocavities
Peng Yin-Sheng
Ye Xiao-Ling
Xu Bo
Niu Jie-Bin
Jia Rui
Wang Zhan-Guo
Liang Song
Yang Xiao-Hong
ACTA PHYSICA SINICA, 2010, 59 (10) : 7073 - 7077
[27] InP-based photonic devices
Doerr, C. R.
2008 CONFERENCE ON OPTICAL FIBER COMMUNICATION/NATIONAL FIBER OPTIC ENGINEERS CONFERENCE, VOLS 1-8, 2008, : 2618 - 2671
[28] InP-based photonic crystal electro-optic modulator
Nikoufard, M.
Amadeh, S.
OPTIK, 2015, 126 (19): : 2219 - 2222
[29] Liquid crystal infiltration of InP-based planar photonic crystals
Martz, J.
Ferrini, R.
Nüesch, F.
Zuppiroli, L.
Wild, B.
Dunbar, L.A.
Houdŕ, R.
Mulot, M.
Anand, S.
Journal of Applied Physics, 2006, 99 (10):
[30] Liquid crystal infiltration of InP-based planar photonic crystals
Martz, J.
Ferrini, R.
Nueesch, F.
Zuppiroli, L.
Wild, B.
Dunbar, L. A.
Houdre, R.
Mulot, M.
Anand, S.
JOURNAL OF APPLIED PHYSICS, 2006, 99 (10)

← 1 2 3 4 5 →