Chemical Vapor Deposition of Graphene on Copper Foils

被引：10

作者：

Rusakov, Pavel S. ^{[1
]}

Kondrashov, I. I. ^{[1
]}

Rybin, M. G. ^{[1
]}

Pozharov, A. S. ^{[1
]}

Obraztsova, E. D. ^{[1
]}

机构：

[1] AM Prokhorov Gen Phys Inst, Moscow 119991, Russia

来源：

JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS | 2013年 / 8卷 / 01期

关键词：

Graphene; CVD; FILMS;

D O I：

10.1166/jno.2013.1443

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The problem of graphene fabrication is still open. Nowadays one of the best methods of graphene synthesis is a chemical vapor deposition (CVD) on copper substrates. Here we present a study of a dependence of the quality and size of synthesized graphene monolayer on the synthesis process parameters. The time of synthesis was found to be one of the key parameters influenced to the number of defects, which was estimated on the base of D peak (1350 cm(-1)) height in Raman spectra. Another important parameters are the substrate maximum temperature and the period of maintaining the sample under this temperature.

引用

页码：79 / 82

页数：4

共 50 条

[31] On the Role of Vapor Trapping for Chemical Vapor Deposition (CVD) Grown Graphene over Copper
Ruemmeli, Mark H.
Gorantla, Sandeep
Bachmatiuk, Alicja
Phieler, Johannes
Geissler, Nicole
Ibrahim, Imad
Pang, Jinbo
Eckert, Juergen
CHEMISTRY OF MATERIALS, 2013, 25 (24) : 4861 - 4866
[32] Effects of Copper Foil Substrate on Graphene Growth by Chemical Vapor Deposition
Wang, Yunpeng
Liu, Yuning
Wang, Tongbo
Zhang, Jianing
Mo, Yongda
Lou, Huafen
Cailiao Daobao/Materials Reports, 2024, 38 (13):
[33] The role of copper pretreatment on the morphology of graphene grown by chemical vapor deposition
Gnanaprakasa, Tony J.
Gu, Yuanxi
Eddy, Steven K.
Han, Zhenxing
Beck, Warren J.
Muralidharan, Krishna
Raghavan, Srini
MICROELECTRONIC ENGINEERING, 2015, 131 : 1 - 7
[34] Chemical vapor deposition growth of graphene on copper substrates: current trends
Antonova, I. V.
PHYSICS-USPEKHI, 2013, 56 (10) : 1013 - 1020
[35] Plasma-enhanced chemical vapor deposition of graphene on copper substrates
Woehrl, Nicolas
Ochedowski, Oliver
Gottlieb, Steven
Shibasaki, Kosuke
Schulz, Stephan
AIP ADVANCES, 2014, 4 (04)
[36] Preparation of Graphene on Copper Substrates of Various Geometries by Chemical Vapor Deposition
E. V. Zaitsev
G. S. Bocharov
P. N. Chuprov
S. V. Tkachev
D. Yu. Kornilov
S. P. Gubin
A. V. Eletskii
E. S. Kurkina
Inorganic Materials, 2018, 54 : 1205 - 1215
[37] Growth from below: bilayer graphene on copper by chemical vapor deposition
Nie, Shu
Wu, Wei
Xing, Shirui
Yu, Qingkai
Bao, Jiming
Pei, Shin-shem
McCarty, Kevin F.
NEW JOURNAL OF PHYSICS, 2012, 14
[38] Large Physisorption Strain in Chemical Vapor Deposition of Graphene on Copper Substrates
He, Rui
Zhao, Liuyan
Petrone, Nicholas
Kim, Keun Soo
Roth, Michael
Hone, James
Kim, Philip
Pasupathy, Abhay
Pinczuk, Aron
NANO LETTERS, 2012, 12 (05) : 2408 - 2413
[39] Preparation of Graphene on Copper Substrates of Various Geometries by Chemical Vapor Deposition
Zaitsev, E. V.
Bocharov, G. S.
Chuprov, P. N.
Tkachev, S. V.
Kornilov, D. Yu.
Gubin, S. P.
Eletskii, A. V.
Kurkina, E. S.
INORGANIC MATERIALS, 2018, 54 (12) : 1205 - 1215
[40] Effect of Copper Pretreatment on Growth of Graphene Films by Chemical Vapor Deposition
Sun Futong
Feng Aihu
Chen Bingbing
Yu Yun
Yang Hong
JOURNAL OF INORGANIC MATERIALS, 2020, 35 (10) : 1177 - 1182

← 1 2 3 4 5 →