High-speed height measurement by a light-source-stepping method using a linear LED array

被引：42

作者：

Fujigaki, Motoharu ^{[1
]}

Oura, Yohei ^{[2
]}

Asai, Daisuke ^{[3
]}

Murata, Yorinobu ^{[1
]}

机构：

[1] Wakayama Univ, Fac Syst Engn, Wakayama 6408510, Japan

[2] Wakayama Univ, Grad Sch Syst Engn, Wakayama 6408510, Japan

[3] HIKARI Co Ltd, Tohon, Ehime 7910297, Japan

来源：

OPTICS EXPRESS | 2013年 / 21卷 / 20期

关键词：

3-D SHAPE MEASUREMENT; PHASE-SHIFTING METHOD; PROJECTION;

D O I：

10.1364/OE.21.023169

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

High-speed height measurement is required in industrial fields for analyzing the behavior of a breaking object, a vibrating object or a rotating object. A shape measurement performed using a phase-shifting method can measure the shape with high spatial resolution because the coordinates can be obtained pixel by pixel. A light-source-stepping method (LSSM) that uses a linear LED array by means of a whole-space tabulation method (WSTM) has been proposed. Accurate shape measurement can be performed using this method. The response speed of the LED array is greater than 12 kHz. In this paper, height measurement is performed using WSTM and LSSM with a linear LED array and a high-speed camera. It was verified that the response speed of the linear LED is greater than 200 kHz. The phase shifting was performed at 12 kHz, and the height measurement of the vibrating woofer was performed at 4 kHz using a 3-step phase-shifting method. (C) 2013 Optical Society of America

引用

页码：23169 / 23180

页数：12

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