To develop a high speed auto-alignment system by dual machine vision based alignment system

被引：0

作者：

Chen, Chun-Jen ^{[1
]}

Jywe, Wenyuh ^{[2
]}

Teng, Yunfeng ^{[2
]}

Chen, Yi-Ju ^{[1
]}

Hung, Min-Wei ^{[1
]}

机构：

[1] Natl Appl Res Labs, Instrument Technol Res Ctr, 20,R&D Rd 6,Hsinchu Sci Pk, Hsinchu 30076, Taiwan

[2] Natl Formosa Univ, Dept Automat Engn, Huwei Township 632, Yunlin, Taiwan

来源：

INTERNATIONAL CONFERENCE ON OPTICS IN PRECISION ENGINEERING AND NANOTECHNOLOGY (ICOPEN2013) | 2013年 / 8769卷

关键词：

screen printing alignment; auto alignment; PRECISION; SIDE;

D O I：

10.1117/12.2018829

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper, 2 sub machine vision based alignment systems were used to establish a high speed alignment system for screen printing. It can be used on the solar cell and flat display panel manufacture. The 2 sub alignment system can auto align target simultaneously. When one target was takes out, another target can implement auto alignment simultaneously. It can save the wait time for target take out procedure. The sub alignment system includes 4 CCD cameras, 4 lens, 4 outer coaxial LED light sources, a vacuum table and a 3 axis motorized stage. The alignment accuracy is about 1 mu m.

引用

页数：7

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