Post-deposition growth kinetics of Ge on Ge(001)

被引:1
|
作者
Tinkham, B. P. [1 ]
Jenichen, B. [1 ]
Kaganer, V. M. [1 ]
Shayduk, R. [1 ]
Braun, W. [1 ]
Ploog, K. H. [1 ]
机构
[1] Paul Drude Inst Solid State Elect, D-10117 Berlin, Germany
关键词
high-resolution x-ray diffraction; surfaces; molecular beam epitaxy; semiconducting germanium;
D O I
10.1016/j.jcrysgro.2008.04.035
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We study the nucleation and growth kinetics on the Ge(0 0 1) surface at elevated temperatures using in situ surface X-ray diffraction. The time evolution of characteristic length scales on the surface is analyzed through the widths of the different components of the integer-order (morphology sensitive) and fractional-order (reconstruction sensitive) diffraction peaks. We find an activation energy of 0.58 eV for Ge island nucleation during homoepitaxy, which implies a diffusion activation energy higher than that obtained for both adatom and dimer diffusion on Ge(0 0 1) in previous studies. Sub-monolayer homoepitaxial Ge islands coarsen according to a power law, with a relatively low time exponent of n = 0.2. The coarsening of small 2 x 1 reconstruction domains on a flat surface prepared by deposition of an integer number of layers shows a strong temperature dependence, whereby the coarsening exponent decreases from 0.41 to 0.2 as the temperature is increased. (c) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:3416 / 3421
页数:6
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