SIMULATION OF RADIATION EFFECTS IN ULTRA-THIN INSULATING LAYERS

被引：5

作者：

Timotijevic, Ljubinko B. ^{[1
]}

Vujisic, Milos Lj ^{[1
]}

Stankovic, Koviljka Dj. ^{[1
]}

机构：

[1] Univ Belgrade, Fac Elect Engn, Belgrade 11001, Serbia

来源：

NUCLEAR TECHNOLOGY & RADIATION PROTECTION | 2013年 / 28卷 / 03期

关键词：

insulator proton; alpha particle; ion beam; radiation effect; Monte Carlo simulation; OXIDE; HARDNESS; EPROMS;

D O I：

10.2298/NTRP1303308T

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

The Monte Carlo simulations of charged particle transport are used to investigate the effects of exposing ultra-thin layers of insulators (commonly used in integrated circuits) to beams of protons, alpha particles and heavy ions. Materials considered include silicon dioxide, aluminum nitride, alumina, and polycarbonate - lexan. The parameters that have been varied in simulations include the energy of incident charged particles and insulating layer thickness. Materials are compared according to both ionizing and non-ionizing effects produced by the passage of radiation.

引用

页码：308 / 315

页数：8

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