Laser processing of alumina ceramic by a spatially superposing millisecond laser and a nanosecond laser with different beam shapes

被引：4

作者：

Jia, Xianshi ^{[1
,2
]}

Dong, Jing ^{[1
,2
]}

Chen, Yongqian ^{[1
,2
]}

Wang, Hailin ^{[1
,2
]}

Zhu, Guangzhi ^{[1
,2
]}

Shan, Ping ^{[3
]}

Aleksei, Kozlov ^{[4
]}

Zhu, Xiao ^{[1
,2
]}

机构：

[1] Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Hubei, Peoples R China

[2] Natl Engn Res Ctr Laser Proc, Wuhan 430074, Hubei, Peoples R China

[3] Anshan Huazhong Univ Sci & Technol Laser Technol, Anshan 114000, Liaoning, Peoples R China

[4] MF Stelmakh Joint Stock Co, POLYUS Res Inst, Moscow 117342, Russia

来源：

APPLIED OPTICS | 2020年 / 59卷 / 24期

基金：

中国国家自然科学基金;

关键词：

PULSE; BESSEL; METAL; HOLES;

D O I：

10.1364/AO.397701

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Advanced combined pulse laser (CPL) processing technology with high processing efficiency is of interest for both academic and engineering prospects. However, the influence of the spatial superposition of the CPL on the processing quality is unclear. Here, we use a CPL composed of a nanosecond and millisecond laser with different beam shapes to drill alumina ceramic. Experimental and simulation results suggest that the CPL drilling process actively homogenizes the laser in the hole through multi-reflection of the laser, and thus holes with high circularity are obtained without the influence of the beam shape of the nanosecond laser. The research shows this to be a novel processing method, and that the processing quality is independent of the laser beam shape. (C) 2020 Optical Society of America

引用

页码：7195 / 7200

页数：6

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