Synthesis and characterization of organo-soluble and photosensitive benzocyclobutene-terminated imides

被引：14

作者：

Yang, Jun ^{[1
]}

Cheng, Yuanrong ^{[1
]}

Jin, Yunxia ^{[1
]}

Deng, Dunying ^{[1
]}

Xiao, Fei ^{[1
]}

机构：

[1] Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China

来源：

EUROPEAN POLYMER JOURNAL | 2013年 / 49卷 / 06期

关键词：

Benzocyclobutene; Thermosets; Curing kinetics; Mechanical properties; Thermal properties; Photosensitivity; ORGANOSOLUBLE POLYIMIDES; POLYMER SYNTHESIS; AROMATIC IMIDES; PHENYL METHANE; BISBENZOCYCLOBUTENE; DIANHYDRIDE; THERMOSETS;

D O I：

10.1016/j.eurpolymj.2013.02.017

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

Three kinds of benzocyclobutene (BCB)-terminated imide monomers have been synthesized by the imidization and Heck reaction. The obtained BCB monomers exhibit good solubility in a wide range of organic solvents at room temperature. The BCB monomers show an exothermal curing behavior in the range of 220-270 degrees C. The curing kinetic parameters, the apparent activation energy (E-a), the frequency factor (A) and the reaction order (n), are obtained by non-isothermal DSC method. The cured BCB resins exhibit good thermal stability (T-d5 > 435 degrees C), high glass transition temperature (T-g > 300 degrees C) and low dielectric constant. Moreover, high quality negative patterns of the BCB films are obtained after the photolithography. (C) 2013 Elsevier Ltd. All rights reserved.

引用

页码：1642 / 1653

页数：12

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