Mesoporous silicon oxynitride thin films

被引：22
|
作者：
Wang, JC
Liu, Q
机构：
[1] Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
来源：
CHEMICAL COMMUNICATIONS | 2006年 / 08期
关键词：
D O I：
10.1039/b513854j
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Highly-ordered, pore-modified with amine groups, and glasslike mesoporous silicon oxynitride thin films were prepared by heat treatment of as-synthesized mesoporous silica thin films in a flowing ammonia environment at high temperatures.
引用
收藏
页码：900 / 902
页数：3
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