Development of a strong field helicon plasma source

被引：12

作者：

Shinohara, S ^{[1
]}

Mizokoshi, H ^{[1
]}

机构：

[1] Kyushu Univ, Interdisciplinary Grad Sch Engn Sci, Kasuga, Fukuoka 8168580, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2006年 / 77卷 / 03期

基金：

日本学术振兴会;

关键词：

D O I：

10.1063/1.2173940

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We developed a high-density helicon plasma source with a very strong field of up to 10 kG. Using a double-loop antenna wound around a quartz tube, 9.5 cm in inner diameter and 90 cm in axial length, initial plasmas with a high density more than 10(13) cm(-3) were successfully produced with a radio frequency power less than a few kilowatts, and with changing magnetic fields, fill pressures, and gas species. (c) 2006 American Institute of Physics.

引用

页数：4

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