Development of a strong field helicon plasma source

被引：12
|
作者：
Shinohara, S [1 ]
Mizokoshi, H [1 ]
机构：
[1] Kyushu Univ, Interdisciplinary Grad Sch Engn Sci, Kasuga, Fukuoka 8168580, Japan
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2006年 / 77卷 / 03期
基金：
日本学术振兴会;
关键词：
D O I：
10.1063/1.2173940
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We developed a high-density helicon plasma source with a very strong field of up to 10 kG. Using a double-loop antenna wound around a quartz tube, 9.5 cm in inner diameter and 90 cm in axial length, initial plasmas with a high density more than 10(13) cm(-3) were successfully produced with a radio frequency power less than a few kilowatts, and with changing magnetic fields, fill pressures, and gas species. (c) 2006 American Institute of Physics.
引用
收藏
页数：4
相关论文
共 50 条
  • [1] Development and characterization of a helicon plasma source
    Sharma, N.
    Chakraborty, M.
    Neog, N. K.
    Bandyopadhyay, M.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2018, 89 (08):
  • [2] Development of very large helicon plasma source
    Shinohara, S
    Tanikawa, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (06): : 1941 - 1946
  • [3] Studies of the Helicon Plasma Source with Inhomogeneous Magnetic Field
    Shikhvotsev, I. V.
    Davydenko, V. I.
    Ivanov, A. A.
    Kotelnikov, I. A.
    Kuzmin, E. I.
    Kreter, A.
    Mishagin, V. V.
    Selivanov, A. N.
    Selivanov, P. A.
    Voskoboynikov, R. V.
    Unterberg, B.
    Karelin, V. A.
    Bambutsa, E. E.
    OPEN MAGNETIC SYSTEMS FOR PLASMA CONFINEMENT (OS2016), 2016, 1771
  • [4] A Helicon Plasma Source
    Braginskii O.V.
    Vasil'eva A.N.
    Kovalev A.S.
    Russian Microelectronics, 2000, 29 (6) : 380 - 390
  • [5] Helicon Plasma Source
    Braginskii O.V.
    Vasil'eva A.N.
    Kovalev A.S.
    Russian Microelectronics, 2002, 31 (6) : 341 - 345
  • [6] Helicon plasma source
    Braginskij, O.V.
    Vasil'eva, A.N.
    Kovalev, A.S.
    Mikroelektronika, 2002, 31 (06): : 403 - 408
  • [7] DEVELOPMENT OF A HYBRID HELICON-ECR PLASMA SOURCE
    Hala, A. M.
    2015 42ND IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCES (ICOPS), 2015,
  • [8] Development of a compact magnetically expanding plasma source with a strong magnetic field
    Takahashi, Kazunori
    Sato, Daiki
    Takaki, Koichi
    Ando, Akira
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2013, 22 (05):
  • [9] Development of a compact magnetically expanding plasma source with a strong magnetic field
    Takahashi, Kazunori
    Sato, Daiki
    Takaki, Koichi
    Ando, Akira
    Plasma Science and Technology, 2013, 22 (05)
  • [10] Development of a compact magnetically expanding plasma source with a strong magnetic field
    Takahashi, Kazunori
    Sato, Daiki
    Takaki, Koichi
    Ando, Akira
    Plasma Sources Science and Technology, 2013, 22 (05)
12345