Compositional instability in InAlN/GaN lattice-matched epitaxy

被引:30
|
作者
Wei, Q. Y. [1 ]
Li, T. [1 ]
Huang, Y. [1 ]
Huang, J. Y. [1 ]
Chen, Z. T. [2 ]
Egawa, T. [2 ]
Ponce, F. A. [1 ]
机构
[1] Arizona State Univ, Dept Phys, Tempe, AZ 85287 USA
[2] Nagoya Inst Technol, Res Ctr Nanodevice & Syst, Showa Ku, Nagoya, Aichi 4668555, Japan
关键词
INGAN ALLOYS; GAN; DISLOCATIONS; ALINN;
D O I
10.1063/1.3690890
中图分类号
O59 [应用物理学];
学科分类号
摘要
The InxAl1-xN/GaN system is found to show compositional instability at the lattice-matched composition (x = 0.18) in epitaxial layers grown by metal organic chemical vapor deposition. The breakdown in compositional homogeneity is triggered by threading dislocations with a screw component propagating from the GaN underlayer, which tend to open up into V-grooves at a certain thickness of the InxAl1-xN layer. The V-grooves coalesce at similar to 200 nm and are filled with material that exhibits a significant drop in indium content and a broad luminescence peak. Transmission electron microscopy suggests that the structural breakdown is due to heterogeneous nucleation and growth at the facets of the V-grooves. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3690890]
引用
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页数:3
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