Monolithically Lens-Integrated Photonic Device Arrays for Compact Optical Transceivers

被引:2
|
作者
Shinoda, Kazunori [1 ]
Adachi, Koichiro [1 ]
Lee, Yong [1 ]
Kitatani, Takeshi [1 ]
Fukamachi, Toshihiko [1 ]
Yamashita, Hiroki [1 ]
Takemoto, Takashi [1 ]
Yuki, Fumio [1 ]
Sugawara, Toshiki [1 ]
Tanaka, Shigehisa [1 ]
Tsuji, Shinji [1 ]
机构
[1] Hitachi Ltd, Cent Res Lab, Kokubunji, Tokyo 1858601, Japan
关键词
LASER-DIODE; OPERATION; ALIGNMENT;
D O I
10.7567/JJAP.52.022701
中图分类号
O59 [应用物理学];
学科分类号
摘要
Monolithically lens-integrated surface-emitting distributed-feedback (DFB) laser arrays and p-i-n photodiode arrays were developed. A combination of dry etching and wet chemical etching was used to fabricate a monolithic InP lens. The lens profile within +/-10 mu m from the lens center was estimated to be parabolic shape, which is ideal for the collimation of a Gaussian beam. A fabricated lens-integrated surface-emitting DFB laser exhibited a circular, narrow far-field pattern with full-width at half maximums of 3.9 x 3.5 degrees. An efficient direct coupling of the lens-integrated DFB laser to a single-mode fiber with a coupling efficiency of -3 dB was confirmed. A four-channel lens-integrated surface-emitting laser array and a lens-integrated p-i-n photodiode array were used to fabricate a very compact 100 Gbps (25 Gbps x 4 channel) optical transceiver with 14 x 9 mm(2) footprint. (C) 2013 The Japan Society of Applied Physics
引用
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页数:8
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