Commercialization of silicon-based gas sensors

被引：0
|
作者：
Lyle, RP
Walters, D
机构：
来源：
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年
关键词：
gas sensor; metal oxide; CO;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Large scale production capability of silicon based tin oxide gas sensors has been established. It is well known that metal oxide gas sensors are sensitive to both ambient temperature and relative humidity. Humidity compensation is accomplishd through use of a specific sequential mode of operation. Device sensitivity from zero to 400ppm CO over the range of 20% to 80% relative humidity is presented.
引用
收藏
页码：975 / 978
页数：4
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