Cleanroom Utilities Overview University of Louisville

被引：0

作者：

Yeager, Don ^{[1
]}

机构：

[1] Univ Louisville, Tech Res Serv, Ctr MicroNanoTechnol, Louisville, KY 40292 USA

来源：

2008 17TH BIENNIAL UNIVERSITY/GOVERNMENT/INDUSTRY MICRO-NANO SYMPOSIUM, PROCEEDINGS | 2008年

关键词：

deionized water; liquid nitrogen; acid waste neutralization; toxic gas monitoring; cleanroom utilities;

D O I：

10.1109/UGIM.2008.56

中图分类号：

G40 [教育学];

学科分类号：

040101 ; 120403 ;

摘要：

Details about four major utilities that support the University of Louisville's new Micro/NanoTechnology Cleanroom are presented. This includes a 3000 gal. deionized water system capable of delivering 18.1 Mohm-cm water at a rate of 75 gal./min., a 6,000 gal. liquid nitrogen system for delivering high purity nitrogen gas, an acid waste neutralizing system for automatically adjusting pH of cleanroom effluent, and a toxic gas monitoring system capable of monitoring over 60 satellite gas sensors.

引用

页码：191 / 193

页数：3

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