Cleanroom Utilities Overview University of Louisville

被引：0
|
作者：
Yeager, Don [1 ]
机构：
[1] Univ Louisville, Tech Res Serv, Ctr MicroNanoTechnol, Louisville, KY 40292 USA
来源：
2008 17TH BIENNIAL UNIVERSITY/GOVERNMENT/INDUSTRY MICRO-NANO SYMPOSIUM, PROCEEDINGS | 2008年
关键词：
deionized water; liquid nitrogen; acid waste neutralization; toxic gas monitoring; cleanroom utilities;
D O I：
10.1109/UGIM.2008.56
中图分类号：
G40 [教育学];
学科分类号：
040101 ; 120403 ;
摘要：
Details about four major utilities that support the University of Louisville's new Micro/NanoTechnology Cleanroom are presented. This includes a 3000 gal. deionized water system capable of delivering 18.1 Mohm-cm water at a rate of 75 gal./min., a 6,000 gal. liquid nitrogen system for delivering high purity nitrogen gas, an acid waste neutralizing system for automatically adjusting pH of cleanroom effluent, and a toxic gas monitoring system capable of monitoring over 60 satellite gas sensors.
引用
收藏
页码：191 / 193
页数：3
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