A method of testing surface adsorption exponent of thin film gas sensor

被引：0
|
作者：
Xing, JP [1 ]
Juan, L [1 ]
Zeng, FT [1 ]
Qiu, NW [1 ]
机构：
[1] Shandong Univ, Sch Informat Sci & Engn, Jinan 250100, Peoples R China
来源：
ICEMI 2005: Conference Proceedings of the Seventh International Conference on Electronic Measurement & Instruments, Vol 7 | 2005年
关键词：
response time; thin film; surface adsorption exponent; gas sensor;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we adopt Sputtered method to develop ZnO and SnO2/CeO2 nanometer gas sensitive films. The rules of the characteristic time, response and recovery time of the gas sensing thin film tau(s) and tau(c) are summarized. Using the method of combining theory with experiment the surface adsorption exponent gamma is studied. It is seen that it can be investigated for the micro physical chemistry characters of gas sensing thine films by using characteristic time.
引用
收藏
页码：34 / 37
页数：4
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