Cyclic thin film flexible pressure sensor testing

被引：0
|
作者：
Lim, Hee C. [1 ]
Zunino, James L., III [2 ]
Federici, John F. [1 ]
机构：
[1] New Jersey Inst Technol, Dept Phys, Newark, NJ 07102 USA
[2] US Army, ARDEC, Picatinny Arsenal, NJ USA
来源：
RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS VI | 2007年 / 6463卷
关键词：
D O I：
10.1117/12.704223
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页数：8
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