Fabrication of an X-Ray Mirror Used in a Soft X-Ray Microscope

被引：0
|
作者：
Chon, K. S. [1 ]
Namba, Y. [2 ]
Yoon, K. H. [1 ,3 ]
机构：
[1] Wonkwang Univ, Inst Radiol Imaging Sci, 334-2 Sinyong Dong, Iksan 570749, Jeonbuk, South Korea
[2] Chubu Univ, Dept Mech Engn, Kasugai, Aichi, Japan
[3] Wonkwang Univ, Inst Radiolog Imaging Sci, Dept Radiol, Iksan, South Korea
来源：
WORLD CONGRESS ON MEDICAL PHYSICS AND BIOMEDICAL ENGINEERING 2006, VOL 14, PTS 1-6 | 2007年 / 14卷
基金：
日本学术振兴会;
关键词：
Soft X-ray microscope; X-ray optics; X-ray mirror fabrication; Replication method;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
Reflective X-ray optics used in a soft X-ray microscope require a super-smooth surface and highly accurate figure. We considered a Wolter type I mirror as a condenser optic. The mirror of 1/4 X magnification was optimized for observing living cells at a wavelength of 2.3 nm in a laboratory prototype. The mirror was fabricated by an epoxy replication technique. The surface roughness and figure error of the replicated gold mirror were 1.2 nm rms and 160 nm PV, respectively. The replicated gold mirror copied the original master mandrel very well. Several mirrors could be successfully made from one master mandrel.
引用
收藏
页码：1644 / +
页数：3
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