Surface plasmon resonance of centimeter-scale plasmonic crystal structures for sensor applications

被引：1
|
作者：
Lee, Dong-Jin [1 ]
Yim, Hae-Dong [1 ]
Lee, Seung-Gol [1 ]
Beom-Hoan, O. [1 ]
机构：
[1] Inha Univ, Dept Informat & Commun Engn, Inchon 402751, South Korea
来源：
MICROELECTRONIC ENGINEERING | 2012年 / 98卷
基金：
新加坡国家研究基金会;
关键词：
Plasmonic crystal; Surface plasmon resonance (SPR) sensor; Near-field holographic (NFH) lithography; GRATING MASKS; LITHOGRAPHY;
D O I：
10.1016/j.mee.2012.07.031
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We fabricate the centimeter-scale plasmonic crystal structures based on periodic arrays of gold nanowells and nanobumps on glass substrates. To generate plasmonic crystal structures, we use the near-field holography system with double-exposure in which the sample was rotated by 90 degrees. The resonant characteristics of the plasmonic crystal structures are experimentally investigated. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：436 / 439
页数：4
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