The surface morphology of Ba0.65Sr0.35TiO3 thin film by sol-gel method

Thin films of barium strontium titanate, Ba0.65Sr0.35TiO3, (BST), were deposited on Pt/Ti/SiO2/Si substrates with approximately 300 nm thickness by sol-gel method. Qualitative film analysis was performed with atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy TEM. AFM indicated that surface roughness of the film increases with the concentrations of precursor solutions and that the BST thin films fabricated by low concentrations precursor solutions were characterized by a small surface roughness with a crack-free uniform microstructure. Farther more, the dielectric properties of BST films were measured.