Young's modulus and residual stress of GeSbTe phase-change thin films

被引：14

作者：

Nazeer, Hammad ^{[1
]}

Bhaskaran, Harish ^{[2
]}

Woldering, Leon A. ^{[1
]}

Abelmann, Leon ^{[1
,3
]}

机构：

[1] Univ Twente, MESA Res Inst, NL-7500 AE Enschede, Netherlands

[2] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

[3] KIST Europe, Saarbrucken, Germany

来源：

THIN SOLID FILMS | 2015年 / 592卷

基金：

英国工程与自然科学研究理事会;

关键词：

Young's modulus; Strain; Phase change; GeSbTe; Cantilever resonance; CALORIMETRIC MEASUREMENTS; GE2SB2TE5; FILMS; TRANSFORMATIONS; CRYSTALLIZATION;

D O I：

10.1016/j.tsf.2015.08.049

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The mechanical properties of phase change materials alter when the phase is transformed. In this paper, we report on experiments that determine the change in crucial parameters such as Young's modulus and residual stress for two of the most widely employed compositions of phase change films, Ge1Sb2Te4 and Ge2Sb2Te5, using an accurate microcantilever methodology. The results support understanding of the exact mechanisms that account for the phase transition, especially with regard to stress, which leads to drift in non-volatile data storage. Moreover, detailed information on the change in mechanical properties will enable the design of novel low-power nonvolatile MEMS. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：69 / 75

页数：7

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