Non-volatile Al2O3 memory using an Al-rich structure as a charge-storing layer (vol 41, pg 721, 2005)

被引:0
|
作者
Nakata, S
Saito, K
Shimada, M
机构
关键词
D O I
10.1049/el:20060797
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:497 / 497
页数:1
相关论文
共 50 条
  • [31] Optimization of MIS type Non-Volatile Memory Device with Al-Doped HfO2as Charge Trapping Layer
    Yoon, Geonju
    Kim, Taeyong
    Agrawal, Khushabu
    Kim, Jaemin
    Park, Jinsu
    Kim, Hyun-Hoo
    Cho, Eun-Chel
    Yi, Junsin
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2020, 9 (07)
  • [32] The Effect of Thermal Treatment Induced Performance Improvement for Charge Trapping Memory with Al2O3/(HfO2)0.9(Al2O3)0.1/Al2O3 Multilayer Structure
    Hou, Zhaozhao
    Wu, Zhenhua
    Yin, Huaxiang
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2018, 7 (12) : Q229 - Q234
  • [33] Total Ionization Dose Effects on Charge-Trapping Memory With Al2O3/HfO2/Al2O3 Trilayer Structure
    Bi, J. S.
    Xu, Y. N.
    Xu, G. B.
    Wang, H. B.
    Chen, L.
    Liu, M.
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2018, 65 (01) : 200 - 205
  • [34] Etching rate, optical transmittance, and charge trapping characteristics of Al-rich Al2O3 thin film fabricated by rf magnetron cosputtering
    Nakata, Shunji
    Nagai, Shingo
    Kumeda, Minoru
    Kawae, Takeshi
    Morimoto, Akiharu
    Shimizu, Tatsuo
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (04): : 1373 - 1378
  • [35] Integrated low-temperature process for the fabrication of amorphous Si nanoparticles embedded in Al2O3 for non-volatile memory application
    Ilse, Klemens
    Schneider, Thomas
    Ziegler, Johannes
    Sprafke, Alexander
    Wehrspohn, Ralf B.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2016, 213 (09): : 2446 - 2451
  • [36] Non-Volatile Ternary Content Addressable Memory (TCAM) with Two HfO2/Al2O3/GeOx/Ge MOS Diodes
    Zhang, Yi
    Chen, Bing
    Dong, Wenfeng
    Liu, Wei
    Xu, Shun
    Cheng, Ran
    Lee, Shiuh-Wuu
    Zhao, Yi
    2018 IEEE SYMPOSIUM ON VLSI TECHNOLOGY, 2018, : 105 - 106
  • [37] Model based precise analysis of the injection currents in Al/ZrO2/Al2O3/ZrO2/SiO2/Si structures for use in charge trapping non-volatile memory devices
    Novkovski, N.
    Paskaleva, A.
    Skeparovski, A.
    Spassov, D.
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2016, 44 : 30 - 37
  • [38] Charge Trapping Memory Characteristics of p-Si/Ultrathin Al2O3O/(HfO2)0.8(Al2O3)0.2/Al2O3/Metal Multilayer Structure
    Tang, Zhenjie
    Xia, Yidong
    Xu, Hanni
    Yin, Jiang
    Liu, Zhiguo
    Li, Aidong
    Liu, Xiaojie
    Yan, Feng
    Ji, Xiaoli
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 14 (02) : G13 - G16
  • [39] Impact of process parameters on the structural and electrical properties of metal/PZT/Al2O3/silicon gate stack for non-volatile memory applications
    Singh, Prashant
    Jha, Rajesh Kumar
    Singh, Rajat Kumar
    Singh, B. R.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2018, 124 (02):
  • [40] Impact of process parameters on the structural and electrical properties of metal/PZT/Al2O3/silicon gate stack for non-volatile memory applications
    Prashant Singh
    Rajesh Kumar Jha
    Rajat Kumar Singh
    B. R. Singh
    Applied Physics A, 2018, 124