Electron heating during microwave gas discharge sustained by surface cyclotron waves

Theoretical analysis of electron heating in microwave gas discharge sustained by surface cyclotron waves (SCW) is presented. A discharge chamber with planar geometry immersed into a steady magnetic field that is oriented perpendicularly to the plasma interface is considered. The plasma is assumed to be bounded by a planar dielectric sheath. The SCW are the eigenmodes of this structure. Their eigenfrequencies belong to the ranges between the harmonies of the electron cyclotron frequency SCW propagate across the external steady magnetic field. Plasma particle motion is examined using a kinetic approach. A model of particle mirror reflection from the interface of the plasma is utilized. Spatial distribution of the SCW electromagnetic fields, SCW power how and their energy absorption by plasma particles under both collisional and collisionless regimes are studied analytically. The presented results can be interesting for plasma technologies on processing of solids.