Carbon nanotube resonators with capacitive and piezoresistive current modulation readout

被引:10
|
作者
Lee, Shih-Wei [1 ]
Truax, Stuart [1 ]
Yu, Liu [1 ]
Roman, Cosmin [1 ]
Hierold, Christofer [1 ]
机构
[1] ETH, CH-8092 Zurich, Switzerland
基金
瑞士国家科学基金会;
关键词
QUALITY FACTOR; MECHANISM; STRAIN;
D O I
10.1063/1.4815988
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this work, a single-walled carbon nanotube (SWCNT) nanomechanical resonator is characterized at mechanical resonance using both capacitive modulation and piezoresistive modulation effects. The piezoresistive modulation effect is shown to be a robust method for measuring the resonant response, allowing improved detection of the SWCNT resonance by reducing the off-resonance drain current by a factor of up to 10. Equivalent circuit parameters describing the piezoelectric effect are extracted. The measured device shows a Q-factor of 91 and a piezoresistive bandgap bending of 0.04 eV/% strain for a resonance at 79.5MHz. The SWCNT is measured at 300K and 7 x 10(-4) Pa. (C) 2013 AIP Publishing LLC.
引用
收藏
页数:5
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