Carbon nanotube resonators with capacitive and piezoresistive current modulation readout

被引：10

作者：

Lee, Shih-Wei ^{[1
]}

Truax, Stuart ^{[1
]}

Yu, Liu ^{[1
]}

Roman, Cosmin ^{[1
]}

Hierold, Christofer ^{[1
]}

机构：

[1] ETH, CH-8092 Zurich, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2013年 / 103卷 / 03期

基金：

瑞士国家科学基金会;

关键词：

QUALITY FACTOR; MECHANISM; STRAIN;

D O I：

10.1063/1.4815988

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this work, a single-walled carbon nanotube (SWCNT) nanomechanical resonator is characterized at mechanical resonance using both capacitive modulation and piezoresistive modulation effects. The piezoresistive modulation effect is shown to be a robust method for measuring the resonant response, allowing improved detection of the SWCNT resonance by reducing the off-resonance drain current by a factor of up to 10. Equivalent circuit parameters describing the piezoelectric effect are extracted. The measured device shows a Q-factor of 91 and a piezoresistive bandgap bending of 0.04 eV/% strain for a resonance at 79.5MHz. The SWCNT is measured at 300K and 7 x 10(-4) Pa. (C) 2013 AIP Publishing LLC.

引用

页数：5

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