Measurement Vertex Position of a Large Aspheric Mirror

被引:2
|
作者
Li, Jie [1 ]
Yan, Fengtao [1 ]
Chen, Lin [1 ]
Yang, Jie [1 ]
Wan, Yongjian [1 ]
机构
[1] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
来源
APPLIED SCIENCES-BASEL | 2019年 / 9卷 / 06期
关键词
optical measurement; dimensional measurement; aspheric mirror; vertex position;
D O I
10.3390/app9061038
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We present a novel method to accurately measure the vertex position of a large aspheric mirror with a phasing measuring interferometer, a laser tracker, and a micro alignment telescope. The method consists of rotating the mirror by 180 degrees about its mechanical axis and measuring the change in displacement. Use of a micro alignment telescope eliminates the need to adjust the mirror during the measurement, eases the alignment of the testing system, and improves the vertex position measurement accuracy. Using this method, we measured the vertex position of an aspheric mirror 1 m in diameter and 2 m in radius of curvature. The vertex position measurement uncertainty is 88 m.
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收藏
页数:6
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