共 50 条
- [35] Ablation and cutting of planar silicon devices using femtosecond laser pulses APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 77 (02): : 237 - 242
- [36] Ablation and cutting of planar silicon devices using femtosecond laser pulses Applied Physics A: Materials Science and Processing, 2003, 77 (02): : 237 - 242
- [37] Microfabrication of Biofactory-on-a-Chip devices using laser ablation technology DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 572 - 580
- [39] Maskless, rapid manufacturing of glass microfluidic devices using a picosecond pulsed laser Scientific Reports, 9