共 50 条
- [21] Model-based analysis of the limits of optical metrology with experimental comparisons - art. no. 66170W Modeling Aspects in Optical Metrology, 2007, 6617 : W6170 - W6170
- [22] Modeling the effect of line profile variation on optical critical dimension metrology - art. no. 65180Z Metrology, Inspection, and Process Control for Microlithography XXI, Pts 1-3, 2007, 6518 : Z5180 - Z5180
- [23] A large deflection translatory actuator for optical path length modulation - art. no. 618604 MEMS, MOEMS, and Micromachining II, 2006, 6186 : 18604 - 18604
- [24] Optical receivers with large-diameter photodiode - art. no. 61831D Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, 2006, 6183 : D1831 - D1831
- [26] Metrology challenges for advanced lithography techniques - art. no. 65181G Metrology, Inspection, and Process Control for Microlithography XXI, Pts 1-3, 2007, 6518 : G5181 - G5181
- [27] A SEM-based system for photomask placement metrology - art. no. 660727 PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY XIV, PTS 1 AND 2, 2007, 6607 : 60727 - 60727
- [28] Pico meter metrology for the GAIA mission - art. no. 70102O SPACE TELESCOPES AND INSTRUMENTATION 2008: OPTICAL, INFRARED, AND MILLIMETER, PTS 1 AND 2, 2008, 7010 : O102 - O102
- [29] Visitor Instruments in the ESIO Very Large Telescope Observatory in Paranal - art. no. 70145R GROUND-BASED AND AIRBORNE INSTRUMENTATION FOR ASTRONOMY II, PTS 1-4, 2008, 7014 : R145 - R145
- [30] Cold-atom gas at very high densities in an optical surface microtrap -: art. no. 051401 PHYSICAL REVIEW A, 2002, 66 (05): : 4