New Generation Multijunction Thermal Converters at Sandia National Laboratories

被引:0
|
作者
Johnson-Wilke, Raegan [1 ]
Meyrick, Aaron [1 ]
Dominguez, Jason [1 ]
Lukes, Karl [1 ]
Stanford, Joshua [1 ]
Cular, Stefan [2 ]
O'Brien, Edward [1 ]
机构
[1] Sandia Natl Labs, Primary Stand Lab, Albuquerque, NM 87185 USA
[2] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
关键词
microfabrication; thin film devices; calibration; voltage measurement; ac-dc difference; voltage converters;
D O I
10.1109/cpem49742.2020.9191864
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Multijunction thermal converters are routinely used at many primary standards laboratories for ac voltage measurements and calibrations. After nearly two decades of inactivity, the Primary Standards Laboratory at Sandia National Laboratories has reestablished the process of fabricating silicon-based multijunction thermal converters. Initial results indicate the devices perform similarly to devices fabricated circa 2001 with ac-dc differences of less than 2 mu V/V over the frequency range of 20 Hz to 20 kHz. From 20 kHz to 1 MHz, the ac-dc difference was higher, but remained below 200 mu V/V. In addition to presenting these results, new design considerations, such as high-resistivity substrates for high-frequency applications, are discussed.
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页数:2
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