X-ray reflectivity characterisation of thin-film and multilayer structures

被引：7
|
作者：
Zaumseil, P [1 ]
机构：
[1] Innovat High Performance Microelect, D-15236 Frankfurt, Germany
来源：
Materials for Information Technology: Devices, Interconnects and Packaging | 2005年
关键词：
D O I：
10.1007/1-84628-235-7_40
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：497 / 505
页数：9
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