X-ray reflectivity characterisation of thin-film and multilayer structures

被引：7
|
作者：
Zaumseil, P [1 ]
机构：
[1] Innovat High Performance Microelect, D-15236 Frankfurt, Germany
来源：
Materials for Information Technology: Devices, Interconnects and Packaging | 2005年
关键词：
D O I：
10.1007/1-84628-235-7_40
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：497 / 505
页数：9
相关论文
共 50 条
  • [1] A STUDY OF TRANSMISSION OF MULTILAYER THIN-FILM X-RAY GUIDES
    DUDCHIK, YI
    KOMAROV, FF
    LOBOTSKY, DG
    SOLOVIEV, VS
    TISHKOV, VS
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1993, 325 (1-2): : 343 - 345
  • [2] Study of transmission of multilayer thin-film X-ray guides
    Dudchik, Yu.I.
    Komarov, F.F.
    Lobotsky, D.G.
    Soloviev, V.S.
    Tishkov, V.S.
    [J]. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1993, A325 (1-2) : 343 - 345
  • [3] In situ x-ray reflectivity for thin-film deposition monitoring and control
    Baranov, A
    Kondrashov, P
    Smirnov, I
    [J]. SOLID STATE TECHNOLOGY, 1999, 42 (05) : 53 - +
  • [4] X-ray reflectivity in thin film studies
    Stergioudis, GA
    Logothetidis, S
    Patsalas, PA
    [J]. APPLIED CRYSTALLOGRAPHY, 1998, : 384 - 393
  • [5] Thin-film X-ray waveguide based on a multilayer structure with a nanocavity
    Bushuev, V.A.
    Roshchupkina, O.D.
    [J]. Bulletin of the Russian Academy of Sciences: Physics, 2008, 72 (02) : 192 - 196
  • [6] DISCRETE THIN-FILM MULTILAYER DESIGN FOR X-RAY AND NEUTRON SUPERMIRRORS
    HAYTER, JB
    MOOK, HA
    [J]. JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1989, 22 : 35 - 41
  • [7] Thin-film X-ray waveguide based on a multilayer structure with a nanocavity
    V. A. Bushuev
    O. D. Roshchupkina
    [J]. Bulletin of the Russian Academy of Sciences: Physics, 2008, 72 (2) : 192 - 196
  • [8] IN-SITU X-RAY REFLECTIVITY MEASUREMENTS OF THIN-FILM STRUCTURAL EVOLUTION
    CHASON, E
    CHASON, M
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (04): : 1565 - 1568
  • [9] X-RAY DIFFRACTION BY MULTILAYERED THIN-FILM STRUCTURES AND THEIR DIFFUSION
    DINKLAGE, JB
    [J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (09) : 3781 - &
  • [10] CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY OF X-RAY MULTILAYER THIN-FILM STRUCTURES
    NGUYEN, TD
    GRONSKY, R
    KORTRIGHT, JB
    [J]. JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1991, 19 (04): : 473 - 485
12345