High reliability and low cost uncooled microbolometer IR focal plane array technology for commercial application

被引：0
|
作者：
Tissot, JL [1 ]
Mottin, E [1 ]
Ouvrier-Buffet, JL [1 ]
Vilain, M [1 ]
Yon, JJ [1 ]
Chatard, JP [1 ]
机构：
[1] CEA, LETI, DOPT, F-38054 Grenoble, France
来源：
ADVANCED MICROSYSTEMS FOR AUTOMOTIVE APPLICATIONS 2001 | 2001年
关键词：
amorphous silicon; IRFPA; uncooled microbolometer;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
LETI LIR has been involved in Amorphous Silicon uncooled microbolometer development since 1993. This silicon IR detection technology is now well mastered and very fast industrial transfer has been performed toward Sofradir. After a short description of the technology and the readout circuit architecture, we focus on device reliability which is a key point for uncooled IRFPA commercial application. Methodology for reliability enhancement is described and first results obtained on amorphous silicon reliability are presented.
引用
收藏
页码：209 / 220
页数：12
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