Comparative Study of MVHF and RF Deposited Large Area Multi-junction Solar Cells Incorporating Hydrogenated Nano-Crystalline Silicon

被引：2

作者：

Xu, Xixiang ^{[1
]}

Li, Yang ^{[1
]}

Ehlert, Scott ^{[1
]}

Su, Tining ^{[1
]}

Beglau, Dave ^{[1
]}

Bobela, David ^{[2
]}

Yue, Guozhen ^{[1
]}

Yan, Baojie ^{[1
]}

Zhang, Jinyan ^{[1
]}

Banerjee, Arindam ^{[1
]}

Yang, Jeff ^{[1
]}

Guha, Subhendu ^{[1
]}

机构：

[1] United Solar Ovon LLC, 1100 W Maple Rd, Troy, MI 48084 USA

[2] Natl Renewable Energy Lab, Golden, CO 80401 USA

来源：

AMORPHOUS AND POLYCRYSTALLINE THIN FILM SILICON SCIENCE AND TECHNOLOGY - 2009, VOL 1153 | 2009年 / 1153卷

关键词：

D O I：

10.1557/PROC-1153-A22-02

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report our investigations of large area multi-junction solar cells based on hydrogenated nano-crystalline silicon (nc-Si:H). We compared results from cells deposited by RF (13.56 MHz) at lower deposition rate (similar to 3 angstrom/s)and by Modified Very High Frequency (MVHF) at higher rate (>= 10 angstrom/s). With optimized process conditions and cell structures, we have obtained similar to 12% initial small active-area (similar to 0.25 cm(2)) efficiency for both RF and MVHF cells and 10 similar to 11% large aperture-area (similar to 400 cm(2)) encapsulated MVHF cell efficiency for both a-Si:H/nc-Si: H double-junction and a-Si: H/nc-Si:H/nc-Si:H triple-junction structures on Ag/ZnO coated stainless steel substrate.

引用

页数：6

共 34 条

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