ZnO Nanogenerator Prepared from ZnO Nanorods Grown by Hydrothermal Method

In this study, a zinc oxide (ZnO) film was deposited by sputtering on an indium tin oxide (ITO) glass substrate. ZnO nanorods were then grown on the film by the hydrothermal method, then assembled with a gold electrode to fabricate a nanogencrator. The ZnO nanostructure and nanogenerator were analyzed by field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), and the measurement of current-voltage characteristics. The results of FE-SEM show that the length of the ZnO nanorods increased with the growth time, and the optimal dimensions of the ZnO nanorods were a length of 2 mu m and a diameter of 130 nm at the growth time of 6 h. In the XRD pattern, ZnO (002) and (103) peaks were observed at 2 theta = 34.45 and 62.51 degrees , respectively, confirming that the ZnO nanorods were grown on the substrate. The nanogenerator was driven by an ultrasonic wave to measure its voltage and current. The highest average current and voltage were 3.46 x 10(-6 )A and 5.63 x 10(-2) V, respectively. These results indicate that the ZnO nanorods prepared by the hydrothermal method are suitable for the fabrication of a nanogenerator.