New types of reliability problems in porous ceramic based microdevices

被引：17
|
作者：
Harsanyi, G
机构：
[1] Technical University of Budapest, Department of Electronics Technology
来源：
MATERIALS CHEMISTRY AND PHYSICS | 1996年 / 44卷 / 01期
基金：
匈牙利科学研究基金会;
关键词：
electrochemical migration; material design aspects; porous ceramic based microdevices;
D O I：
10.1016/0254-0584(95)01646-C
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Metals can exhibit dendritic short-circuit growth caused by electrochemical migration in conductor-insulator structures, which may result in failures and reliability problems in microcircuits. The classical model of electrochemcial migration has been well known for several decades. However, a few anomalous and newly discovered phenomenona, characteristic especially of porous ceramic or glass-ceramic based microdevices, have been initiated to perform some revisions and to add supplementary models. The experimental results demonstrate the importance of material design aspects.
引用
收藏
页码：85 / 89
页数：5
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