Shack-Hartmann wavefront sensor for the determination of local inhomogeneities of the surface

The modification of the wavefront registration scheme for the purpose of the sensor spatial resolution improvement is considered. It's proposed to use the focused laser beam for illumination of the separate area of the surface, which after the optical transformation in Fourier optics scheme forms the signal in the sensors plane that is proportional to the spectrum of the spatial frequencies of the surface shape. At the same time the spatial resolution in the surface plane is determined by the sensor aperture, but not the spatial resolution of its lenslet array. The theoretical analysis and computer simulation of the wavefront sensor work for the local inhomogeneitics determination of thereflective surface is realized. For obtainig the submicron spatial resolution of the sensor it is proposed to classify the surface micro areas by the multidimensional statistical analysis methods.