ANALYTICAL ANALYSIS OF MEMS CAPACITIVE PRESSURE SENSOR WITH CIRCULAR DIAPHRAGM UNDER DYNAMIC LOAD USING DIFFERENTIAL TRANSFORMATION METHOD (DTM)

被引：24
|
作者：
Molla-Alipour, Marzieh [1 ]
Ganji, Bahram Azizollah [2 ]
机构：
[1] Islamic Azad Univ, South Tehran Branch, Dept Engn, Tehran, Iran
[2] Babol Univ Technol, Dept Elect Engn, Babol Sar, Iran
来源：
ACTA MECHANICA SOLIDA SINICA | 2015年 / 28卷 / 04期
关键词：
MEMS; capacitive pressure sensor; circular diaphragm; deflection; analytical model; theoretical analysis;
D O I：
10.1016/S0894-9166(15)30025-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method (DTM) and Runge-Kutta method is employed for solving the governing differential equation for the first time. Then the influences of various parameters on central deflection of the diaphragm, stress distribution and capacitance of pressure sensor with a time-dependent pressure are examined Several case studies are compared with simulations to confirm the proposed method. The analytical results compared with ABAQUS simulation show excellent agreement with the simulation results. This method is very promising for time saving in calculating micro-device characteristics.
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页码：400 / 408
页数：9
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