A low-power monolithic three-axis accelerometer with automatically sensor offset compensated and interface circuit

被引:11
|
作者
Yeh, Chih Yuan [1 ]
Huang, Jung Tang [1 ]
Tseng, Sheng-Hsiang [2 ]
Wu, Po-Chang [2 ]
Tsai, Hann-Huei [2 ]
Juang, Ying-Zong [2 ]
机构
[1] Natl Taipei Univ Technol, Mech Engn Dept, Taipei, Taiwan
[2] Taiwan Semicond Res Inst, Natl Appl Res Labs, Taipei, Taiwan
来源
MICROELECTRONICS JOURNAL | 2019年 / 86卷
关键词
CMOS-MEMS; Accelerometer; Automatic calibration; Interface readout circuit; LOW-NOISE; AMPLIFIER;
D O I
10.1016/j.mejo.2019.03.005
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work presents a monolithically integrated CMOS-MEMS three-axis capacitive accelerometer with an effective and practical method to compensate the sensor offset. By using correlated double sampling (CDS) and an automatic sensor offset compensated mechanism in the interface circuit, the purposes of low noise and low zerogravity(zero-g) offset accelerometer are achieved. The zero-g offset compensated circuit calibrates the sensor offset in each axis. All of the calibrated procedure is executed automatically by a micro-control-unit (MCU). After calibration, the worst zero-g offset is reduced to +/- 50 mg and background calibration is no longer needed. The three-axis accelerometer was fabricated by using a 0.18-mu m CMOS-MEMS process and the chip area containing the sensors and the integrated circuit is 2 x 2 mm(2). It achieved a +/- 6 g sensing range and the noise was 350 mu g/rtHz for the X- and Y-axes and Z-axes was 1.5 mg/rtHz with a total current consumption of 120 mu A under 1.8 V.
引用
收藏
页码:150 / 160
页数:11
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